SRIM

The Stopping and Range of Ions in Matter

James F. Ziegler, Jochen P. Biersack, Matthias D. Ziegler

Ch 1

- Historical Review

Ch 2

- Nuclear Stopping of Ions

Ch 3

- Electronic Stopping of Ions

Ch 4

- Stopping of Energetic Light Ions

Ch 5

- Stopping of Ions in Compounds

Ch 6

- Ion Straggling

Ch 7

- TRIM : Scientific Background

Ch 8

- TRIM : Setup and Input

Ch 9

- TRIM : Output Files

Ch 10

- Stopping and Range Tables

Ch 11

- SRIM Tutorials

 

Below are samples from various chapters of the SRIM textbook.


 Preface

This book covers the physical phenomena associated with the penetration of energetic ions into matter. It is primarily concerned with the quantitative evaluation of how ions lose energy into matter and the final distribution of these ions after they stop within the target. Also considered are the first order effects of the atoms on solids, particularly the electronic excitation of the atoms, the displacement of lattice atoms by energetic collisions (lattice damage) and the production of plasmons and phonons within the solid by the passing ions. No evaluation is made of thermal effects in the solid, especially redistribution of lattice atoms or implanted ions by thermal or vacancy induced diffusions.

The scientific literature contains a large amount of experimentally determined stopping powers and ion range distributions. These are not, however, so accurate or dense that direct interpolation to other systems is usually possible. The main goal of this work is to establish methods for determining the stopping and range of ions based on accurate experimental data and extending these values using unified theoretical concepts.

The theoretical chapters of this book are Chapters 2 (Nuclear Stopping in Matter) and 3 (Electronic Stopping in Matter) and they are presented in an elementary tutorial style which needs little background. Chapter 3 presents the traditional stopping of point charges in matter which can be quite accurate for energetic H or He ions (>2 MeV/u) in targets.

Chapter 5 discusses the important matter of variations in stopping in targets in various phases (solid, liquid and gas) and the effects of chemical binding on stopping in compounds.

Chapter 6 is a chapter on the most challenging subject of this book – straggling. It considers the variations of stopping and ranges of ions about their mean values. It is recommended for those who like deep mathematical challenges.

Chapters 7-9 discuss the TRIM software code. Chapter 7 gives the scientific and mathematical background. Chapter 8 discusses how to set TRIM up for a wide range of problems. And Chapter 9 evaluates the various types of output files, and what they mean. 

Chapter 10 is a discussion of PRAL, and transport calculation for quick tables of the range of ions in targets.

Chapter 11 is a set of Tutorials to help students and new users to be come used to SRIM.


 Chapter 1 -  Historical Review

Chapter 1 - Contents

Historical Summary

1-1

Quantum Mechanics and Stopping Theory (1930 – 1935)   

1-8

Analysis of Fission Fragments (1938 – 1941)   

1-8

Particle Stopping in a Free Electron Gas (1947 - 1960)

1-12

Theories for Ranges of Heavy Ions (1963 - 1985)   

1-16

Historical Summary

The history of the penetration of a particle into matter might begin 400 years ago with the study of projectile ballistics, since the understanding of cannonballs in a viscous medium might be considered similar to the penetration of particles in matter.[1] However, in this chapter, we shall review only the last century, from the discovery of radioactive particles (1895). Certain terminology is traditional, and we shall use it from the beginning:

The development of the theory of an ion slowing in a solid has been difficult because the problem of describing both the ion and the target is complex. Once the ion penetrates a solid, it is quickly stripped of some of its electrons, and its charge state becomes a function of the target. The target feels the ion coming, and its electrons polarize around the moving ion. The charge state of the ion is modified by the polarized target, which then further affects the target. The merging of the incident ion’s electrons with the electrons of target atoms causes quantum exclusions of some available states – a complicated matter which is very important in evaluating energy transfer from the ion to the target.. Finally, all of these effects depend on the constantly changing ion velocity.

Early Studies with Radioactive Particles (1899 - 1920)

Soon after the discovery of energetic particle emission from radioactive materials, there was interest in how these corpuscles were slowed down in traversing matter. From her work in 1898-1899, Marie Curie stated the hypothesis that "les rayons alpha sont des projectiles materiels susceptibles de perdre de leur vitesse en traversant la matiere." (00a). Figure 1-2 shows her apparatus, in which particles emitted from radium (source A) went through thin metallic films (at T) and were counted by an electrometer (P).

By varying the thickness of the metallic film, she was able to find the energy loss of the particles as a function of the density of the metal. Many scientists immediately realized that since these particles could penetrate thin films, such experiments might finally unravel the secrets of the atom. Early attempts to create a particle energy loss theory were inconclusive for there was not yet an accurate proposed model of the atom. ..... .....


   Chapter 2.     Nuclear Stopping of Ions

As Bohr suggested in 1913, it is convenient to divide the energy loss of an ion in matter into the losses to the heavy target nuclei, and to the target electrons. This is possible because the nuclei can be assumed to be slowly recoiling for most of the collision, while the electrons will move quickly and often collectively, in response to the charges on the incoming ion. This chapter will cover energy loss by the ion to the target nuclei, and the next chapter will discuss target electrons.

In this section we shall review the mathematics of the collision of two charged point-particles and then the collisional scattering of two atoms, with electrons screening the central nucleus, with emphasis on the elastic energy transferred to the stationary atom. The collision kinematics are calculated from what are called atom-atom interatomic potentials. We discuss various models of atoms and show their potentials and their interatomic potentials. Finally, a detailed calculation is reviewed for hundreds of interatomic potentials using modern solid-state atomic models. These are reduced to a single analytic function which is called a universal interatomic potential. This function is applied to generate new universal nuclear stopping cross-sections and scattering functions which can be used to calculate the physics of ion penetration of solids.....

Nuclear Stopping of Ions 

2-1

Introduction To Two Atom Scattering 

2-1

Defining Center-of-Mass Coordinate System 

2-2

Two-Body Central Force Scattering 

2-8

Interatomic Potentials 

2-10

Model for Calculating Interatomic Potentials 

2-12

The Charge Distribution of Solid-State Targets 

2-16

Single Atom Potentials 

2-17

Interatomic Potentials 

2-21

Accuracy of Interatomic Potential Calculation 

2-26

Universal Interatomic Potential 

2-28

Energy Transfer from Projectile Atom to Target Atom 

2-33

Universal Nuclear Stopping Powers 

2-34

Nuclear Straggling 

2-37

Universal Scattering Formula 

2-38

Appendix to Chapter 

2-44

Accuracy of Universal Interatomic Potentials 

2-44

Citations to Chapter 2 

2-48

  Chapter 3 Electronic Stopping of Ions

 

In this section we shall review the energy loss of an ion to the electrons in the target. The chapter will first describe the simple case of a charged particle moving in a free electron gas, and the basic mechanisms of the interactions. The electronic structure of Hartree-Fock atoms in a solid is described, and how the local-density approximation allows these distributions to be used in ion stopping calculations. The charge state of heavy ions in solids is reviewed, and the concept of effective charge is presented. A description is made of how the effective charge of an ion changes with the local electron density in a solid. Finally, all these concepts are combined into the Brandt-Kitagawa theory of heavy ion stopping in solids. To apply this theory to solids, a description is made of how the screening length (described in detail in Chapter 2) of an ion varies with the Fermi velocity of the conduction electrons in a solid. All these concepts then are brought together in a description of the calculation of electronic stopping cross-sections for ions in solids.....

 

Introduction   

  3-1

Energy Loss of Energetic Protons in Solids   

  3-3

Interaction of a Particle with a Free Electron Gas   

  3-3

Local Density Approximation in Stopping Theory   

  3-7

The Charge State of a Hydrogen Ion   

  3-10

Experimental Hydrogen and Helium Ion Stopping   

  3-11

Proton Stopping: Theory and Experiment   

  3-16

The Electronic Stopping of Heavy Ions   

  3-20

Electronic Stopping: Low Velocity Heavy Ions   

  3-20

Electronic Stopping: High Velocity Heavy Ions   

  3-24

Electronic Stopping: Medium Velocity Heavy Ions   

  3-26

Empirical Electronic Stopping Cross-sections   

  3-31

Summary of Calculation of Stopping Powers   

  3-38

Chapter 3 – Citations   

  3-39


4. Stopping of Energetic Light Ions

The formalism for calculating the stopping of energetic light ions, H, He and Li at energies above 1 MeV/u, has advanced to the point that stopping powers may now be calculated with an accuracy of a few percent for all elemental materials. Although the subject has been of interest for a century, only recently have the final required corrections been understood and evaluated. The theory of energetic ion stopping is reviewed with emphasis on those aspects that pertain to the calculation of accurate stopping powers. This chapter duplicates some of Chapter 3, and extends the concepts to high velocity particles.....

Historical Review  4-2
The Bethe-Bloch Equation  4-3
Variations of the Bethe-Bloch Equation  4-6
Low Velocity Limit of the Bethe-Bloch Theory: Particle Neutralization  4-8
The Primary Stopping Number 4-9
Shell Corrections, C/Z2  4-11
Shell Corrections using Hydrogenic Wave Functions  4-12
Shell Corrections using the Local Density Approximation  4-13
Empirical Summed Shell and Ionization Corrections  4-14
Comparison of Two Types of Shell Correction Calculations  4-18
Density Effect Correction to L0 4-20
The Barkas-Andersen Correction, L1  4-22
The Barkas-Andersen Effect from Charge Sign Considerations  4-22
The Barkas-Andersen Effect from Charge Magnitude Considerations  4-24
Theoretical Barkas-Andersen-Effect Calculations  4-25
Unified Barkas-Andersen Correction Factor  4-26
Empirical Barkas-Andersen Correction Term  4-28
The Bloch Correction, L2  4-33
Relative Magnitude of Bethe-Bloch Corrections  4-34
The Accuracy of Current Stopping Theory  4-36
Appendix  4-39
. Stopping Powers using the Local Density Approximation  4-39
. Lindhard Stopping in a Free Electron Gas  4-39
Stopping Calculations using Local Density Approximation  4-42
Chapter 4 - References  4-46

 

Chapter 5 - Stopping of Ions in Compounds and Gases

Soon after the discovery of energetic particle emission from radioactive materials, there was interest about how these corpuscles were slowed down while transversing matter. In 1900 Marie Curie stated: "Les rayons alpha sont des projectiles materiels susceptibles de perdre de leur vitesse en traversant la matière." [00a] Scientists realized that since these particles could penetrate thin films, experiments measuring their energy loss and scatter might finally unravel the secrets of the atom. Bragg and Kleeman started to conduct such experiments with a radium source in 1903, but were unable to find many types of thin films, since there were no "goldbeaters" in Australia. So they studied the energy loss of alpha particles in hydrocarbon gases such as methyl bromide and methyl iodide to find out how alpha stopping depended on the atomic weight of the target. They analyzed the stopping contribution of hydrogen and carbon atoms in various hydrocarbon target gases by a subtraction of the stopping powers in equivalent pure carbon and hydrogen targets. From their analysis in 1905, comes Bragg's Rule which states that the stopping of a compound may be estimated by the linear combination of the stopping powers of individual elements.[05a]

This rule was long thought to be reasonably accurate, and the measured stopping of ions in compounds usually deviated less than 20% from that predicted by Bragg’s Rule. The accuracy of Bragg’s Rule is limited because the energy loss to the electrons in any material depends on the detailed orbital and excitation structure of the matter, and any differences between elemental materials and the same atoms in compounds will cause Bragg’s Rule to become inaccurate. Further, any bonding changes may also alter the charge state of the ion, thus changing the strength of its interaction with the target medium

Early Experimental Studies   

5-1

Examples of Compound Corrections   

5-6

Calculation of Core and Bond Stopping Corrections   

5-12

  Bragg’s Rule and Heavy Target Elements   

5-17

Examples of Stopping Correction for Compounds   

5-17

  Stopping Correction for a target of  Ethylene   

5-17

  Stopping Correction for a target of  Polystyrene   

5-19

Details and Limitations - Core and Bond Theory   

5-21

The Phase Correction (Gas/Solid) to Stopping   

5-21

Chapter Citations   

5-22


Chapter 7 - TRIM: Scientific Background

           TRIM = TRansport of Ions in Matter

TRIM is Monte Carlo computer program that calculates the interactions of energetic ions with amorphous targets. This program has been called TRIM (transport of ions in matter) for more than 30 years. The program uses several physical approximations to obtain high computer efficiency, while still maintaining accuracy. The two most important approximations are (a) using an analytic formula for determining atom-atom collisions (see section The Magic Formula: Atom-Atom Collisions) and (b) using the concept of a Free-Flight-Path between collisions, so that only significant collisions are evaluated (see section The Free Flight Path).  This chapter provides the scientific and mathematical background to TRIM, and the next two chapters provides help in setting up TRIM calculations and understanding the output files and plots.

Introduction   

7-2

The MAGIC Formula: Atom-Atom Scattering   

7-3

Fitting the Magic Formula Parameter :   

7-5

Interatomic Potentials for the Magic Formula   

7-6

Nuclear Energy Loss and Angular Deflection   

7-7

The FREE FLIGHT PATH between Collisions   

7-8

Free Flight Path for High Energy Ions   

7-8

Free Flight Path for Low Energy Ions & Target Recoils   

7-10

Using  Impulse Approximation for the Free Flight Path   

7-14

Electronic Energy Loss Limits on Free Flight Path   

7-17

Comparison of Calculation and Experiments   

7-18

Definition of Range Moments: Straggling,  Skewness   

7-19

Electronic Straggling in TRIM   

7-24

The Calculation of Target Damage   

7-26

The Kinchin-Pease Model for Vacancy Production   

7-27

Evaluation of Sputtering in TRIM   

7-28

Summary of Radiation Damage Calculations   

7-32

Layered Target Structures, Surfaces   

7-33

Selection of Target Atoms in Compounds   

7-33

Random Number Seed 

7-35


Chapter 8 - TRIM – Setup and Input

            TRIM = TRansport of Ions in Matter

TRIM is Monte Carlo computer program that calculates the interactions of energetic ions with amorphous targets. The specific science and mathematics behind the program were summarized in Chapter 7. This chapter reviews the use of TRIM to evaluate many different kinds of calculations. Most of this chapter may also be found in the Help menus included in the TRIM program. See also Chapter 9, TRIM Output Files, for an explanation of the various TRIM output plots and files

 

Introduction   

8-2

TRIM Setup Window   

8-2

Types of TRIM Calculation (Menu in upper-right corner)   

8-3

● Ion Distribution and Quick Calculation of Damage   

8-3

● Detailed Calculation with Full Damage Cascades   

8-3

● Monolayer Collision Steps   

8-4

● Calculation of Surface Sputtering   

8-4

● Neutron / Electron / Photon Cascades   

8-4

● Various Ion Energy / Angle / Positions   

8-4

● Special Multi-Layer Biological Targets   

8-4

Ion Name, Mass, Energy   

8-4

Target Description   

8-6

Damage Energies of Target Atoms   

8-6

         Calculation Parameters

         “Viewing Window” for Data and Plotting

Output Disk Files   

8-8

Scientific Terms used in TRIM   

8-9

Physics of Recoil Cascades   

8-9

Physics of Sputtering   

8-10

The Stopping of Ions in Compounds   

8-11

Stopping Powers for Ions in Gases   

8-12

Special Applications of TRIM   

8-13

Adding Multiple Ions/ Energies/Angles to Calculation   

8-13

File TRIM.DAT to make Complex TRIM Calculations   

8-14

Calculating Plasma Ions Hitting a Solid (TRIM.DAT)   

8-14

Simulating a Receding Surface from Sputtering   

8-14

Radiation Damage from Neutrons/Electrons/Photons   

8-16

Special Setup for Multi-Layered Biological Targets   

8-18

Obtaining 3-D plots of the Ion’s Electronic Energy Loss   

8-19

How to use TRIM for Isotopically Enriched Targets   

8-20

Straggling in Ion Energy Reducers (Energy Degraders)   

8-20

Getting High-Resolution Collision Data from TRIM   

8-22

Evaluating the Details of “Ion Mixing” Experiments   

8-22

Using TRIM for Mixed Gas/Solid Targets   

8-22

Datafile of Complete Ion Trajectories through a Target   

8-23

TRIM - Common Questions and Solutions   

8-24

“Projected Range” and “Radial Range” Distributions ?   

8-24

Straggling, Skewness and Kurtosis ?   

8-25

What Causes Anomalous Peaks and Dips at Layer Edges ?   

8-26

Running TRIM in Batch mode: TRIM.IN   

8-27

Changing TRIM Plot Colors (TRIM.cfg)   

8-31

The Maximum Size of Recoil Cascades (TRIM.cfg)   

8-31

Incorporating SRIM into Other Software (SRIM Module)   

8-32

Using "SR Module" for tables of Stopping and Range.   

8-33

Individual Atom-Atom Nuclear Stopping Powers   

8-34

Citations for Chapter 8   

8-35


Chapter 9 - TRIM: Output Files

The output of TRIM can be viewed in plots (while the calculation is proceeding) and also in detailed numerical files. The plots are especially useful to see if the calculation is proceeding as expected, but are usually limited in resolution. Most of the datafiles can be requested in the Setup Window for TRIM (menus at the bottom of the window) or can be requested during the calculation. All calculated averages are made over the entire calculation, regardless of when they are requested. That is, if you request a plot of ion ranges after the 100th ion, it will include all the previous ions. Other types of datafiles show details of each ion’s interactions, and are started with the file is selected, and continues filing data on each following ion until the file is stopped.

Chapter Contents

Brief Summary of TRIM Plots and Data Files  

9-2

Ion/Recoil Distribution Plots and Files: 

9-2

Target Damage Plots and Files: 

9-3

Full Calculaton Details (Datafile COLLISON.txt)

9-3

Ion / Target Example used for Chapter’s Output Plots and Files

9-4

Ion Range Distribution and Recoil Atom Distributions 

9-9

3-Dimensional Ion Range Distributions 

9-13

Datafile of Ion Trajectory and Energy in the Target 

9-14

Lateral Ion Range Distribution 

9-15

3-D plots of the Ion’s Electronic Energy Loss  

9-17

Backscattered Ions 

9-18

Transmitted Ions

9-20

Sputtered Target Atoms 

9-21

Combined Tables of Backscattering, Transmitted and Sputtering   

9-24

Ion’s Energy Loss to the Target Electrons   

9-25

Ion’s Energy Loss to the Target Phonons 

9-26

Energy Loss to Vacancy Production / Replacement Collisions 

9-27

Energy Loss from Ions – Energy Loss Absorbed by Target Atoms 

9-31

Details of the Ion-Atom Collision Kinetics

9-33

Physics of Recoil Cascades

9-33

COLLISON.txt - Type "A"– Ions and Quick Estimate of Damage  

9-35

COLLISON.txt - Type "B"– Ions and Simple Recoil Atoms

9-36

COLLISON.txt - Type "C"– Ions, Recoil Atoms and Cascades  

9-38

Special Commands for a TRIM Calculation  

9-39

Changing TRIM Parameters during the Calculation

9-39

SRIM INDEX

Accuracy of PRAL Tables 

10-8 to 10-11

Ahlen, S.

1-12, 1-17,4-3

Air, He Ranges in

5-23

Algorithm for Ion’s Range

10-4 to 10-12

Angle of Incidence of Ion, TRIM

8-5

Animated Plots in TRIM

9-41

Anomalous Peaks and Dips, TRIM

8-26 to 8-27

Atom, Bohr

2-18, 2-22

Atom, Hartree-Foch

2-10, 2-16 to 2-25, 3-8

Atom, Lenz-Jenzen

2-20

Atom, Moliere

2-20

Atom, Morruzzi, Janak and Williams

2-10, 2-17 to 2-25

Atom, Thomas-Fermi

2-10, 2-16 to 2-25

Atom-Atom scattering

2-10 to 2-33, 7-3 to 7-7

Atomic Electron Exchange Energy

2-12 to 2-15, 2-24 to 2-25

Auto-Saving of TRIM Calculation

8-8

B

 

BACKSCAT.txt Datafile

9-18 to 9-19

Backscattered Ions Datafile

9-18 to 9-19

Backscattered Ions in TRIM

8-8

Barkas-Andersen Correction

4-7, 4-22 to 4-32

Batch Mode, Running TRIM in

8-27 to 8-30

Bethe, H.

1-9, 1-12, 3-3

Bethe-Bloch Corrections

4-33 to 36

Bethe-Bloch Equation

4-2 to

Bichsel, H.

1-17, 4-3

Bichsel, Shell Corrections

4-10 to 4-20

Bie   Biersack’s Magic Formula

2-38 to 2-43, 7-3 to 7-7

Binary Collisions

2-10 to 2-33

Binary Scattering - Magic Formula

2-38 to 2-43

Biologic Targets in TRIM

8-4

Bloch Correction, Stopping

3-3, 4-7, 4-30 to 4-33

Bloch F.

1-9, 1-12

Bohr Atom

2-18, 2-22

Bohr Straggling

6-5 to 6-6

Bohr, Neils

1-5 to 1-21, 2-1, 3-3, 2-10, 4-2

Bonding Corrections to Stopping

5-3 to 5-23

Bragg’s Rule

Ch 5

Brandt, W.

1-16

Brandt-Kitagawa Theory

3-29 to 3-40

Building Complex Targets, Tutorial #3

11-15 to 11-20

C

 

Center of Mass Coordinates.

2-2 to 2-8, 6-2 to 6-5

Charge Distributions, Solid State

2-15, 2-17

Charge State - Hydrogen Ion

3-9 to 3-10

Charge state of ion

1-12 to 1-20

Collision Data – High Resolution

8-22

COLLISON.txt (Full Cascades)

9-38 to 9-39

COLLISON.txt (No Cascades)

9-36 to 9-37

COLLISON.txt (Quick Damage)

9-32 to 9-36

COLLISON.txt datafile

8-9, 8-19, 9-3

Colors of TRIM Plots

8-30, 9-41

COM Coordinates

2-2 to 2-8

Complex Targets, Tutorial #3

11-15 to 11-20

Compound Stopping Corrections, Examples

5-6 to 5-20

Compounds in TRIM

Ch 5, 8-6, 8-11

Coordinates, Center of Mass

2-2 to 2-8, 6-2 to 6-5

Core-and-Bond Corrections

5-3 to 5-23

Corrections to Bethe-Bloch

4-33 to 36

Corrections, Core and Bond

5-3 to 5-23

Curie, Marie

1-2

D

 

Damage Calculations in TRIM

7-26 to 7-28,8-7, 8-9 to 8-10

Damage in Target, Tutorial #4

11-21 to 11-28

Damage, Kinchin-Pease Model

7-27 to 7-28,8-7, 8-9 to 8-10

Datafile of Ion’s 3-D Path

8-23 to 8-24, 9-14 to 9-15

Datafile: 3-D Stopping Distribution

9-17 to 9-18

Datafile: BACKSCAT.txt

9-18 to 9-19

Datafile: COLLISON.txt

9-3

Datafile: COLLISON.txt

8-9, 9-17 to 9-18,

Datafile: COLLISON.txt

 

Datafile: COLLISON.txt (Full Cascades)

9-38 to 9-39

Datafile: COLLISON.txt (No Cascades)

9-36 to 9-37

Datafile: COLLISON.txt (Quick Damage)

9-32 to 9-36

Datafile: IONIZ.txt

9-25 to 9-26

Datafile: LATERAL.txt

9-15 to 9-17

Datafile: NOVAC.txt (Replacement Collisions)

9-27 to 9-31

Datafile: PHONON.txt

9-26 to 9-27

Datafile: RANGE 3D.txt

9-14 to 9-15

Datafile: RANGE.txt

9-11 to 9-12

Datafile: SPUTTER.txt

9-21 to 9-23

Datafile: TDATA.sav

9-7 to 9-8

Datafile: TRANSMIT.txt

9-19 to 9-20

Datafile: TRIM.cfg for TRIM Colors

8-30

Datafile: TRIM.IN

9-5 to 9-7, 8-27 to 8-30

Datafile: TRIMOUT.txt

9-24

Datafile: VACANCY.txt

9-27 to 9-30

Datafiles from TRIM

Ch 9

DaVinci, L and SRIM

1-1

Definitions used in Book

1-1

Density Effect in Stopping

4-6, 4-20 to 4-21

Displacement Damage in TRIM

7-27 to 7-28,8-7, 8-9 to 8-10

Displacement Energy in TRIM

8-7, 8-9 to 8-10

Displacements, Tutorial #4

11-21 to 11-28

E

 

Effective Charge in Stopping

3-25 to 3-40, 4-8

Electron Exchange Energy

2-12 to 2-15, 2-24 to 2-25

Electron Induced Cascades in TRIM

8-4, 8-16 to 8-18

Electronic Stopping

Ch  2 to Ch 4

Electronic Stopping - Straggling

Ch 6, 7-24 to 7-26

Electronic Stopping, 3-D Plots

8-19

Electronic Stopping, Lindard

3-4 to 3-6

Electronic Straggling in TRIM

Ch 6, 7-24 to 7-26

Energetic Ion Stopping

Ch 4

Energy Degraders

8-20 to 8-22

Energy to Recoils, Tutorial #4

11-21 to 11-28

Error #62 in TRIM

8-15

Error in TRIM, Regional Settings

8-5

Error in TRIM.DAT

8-15

Error, TRIM Recoil Cascade Size

8-31 to 8-32

Ethylene, Stopping in

5-8

Exchange Energy between Electrons

2-12 to 2-15, 2-24 to 2-25

F

 

Fano, U.

1-12, 1-17, 4-3 to 4-47

FAQs for TRIM

9-41

Fermi, Enrico

1-8, 1-10, 3-3

Firsov Interatomic Potential

2-29

Formvar, Stopping in

5-10

Free Electron Gas

1-12, 3-3 to 3-6

Free Flight Path (FFP) in TRIM

7-7 to 7-17

Free Flight Path and Experiments

7-12 to 7-13

Full Damage Calculation  in TRIM

8-4

G

 

Gas / Solid Targets in TRIM

8-6, 8-11, 8-22 to 8-23

Gas / Solid Targets, Tutorial #3

11-15 to 11-20

Gas Phase Corrections

5-6 to 5-7, 5-21

Gases, Stopping in

Ch 5

Geiger, H.

1-5

H

 

Hartree-Foch Atom

2-10, 2-16

He ions in Air – Range

5-23

Heavy Ion Stopping, BK Theory

3-29 to 3-40

Heavy Ion, Scaling of Stopping

3-24 to 3-40

Helium Ion – Stopping

3-10 to 3-16

Help during TRIM Calculation

9-41

History of Stopping and Ranges

Ch 1

History of Stopping Theory

4-2

Hydrocarbons, Stopping in

5-2 to 5-3, 5-10

Hydrogen Ion – Stopping

3-10 to 3-20

Hydrogen Ion, Charge State

3-9 to 3-10

I

 

Impact Parameter and Free Flight Path

7-15

Impulse Approx. in Free Flight Path

7-14 to 7-17

Input Parameters to TRIM

Ch 8

Input Window in TRIM

8-2 to 8-3

Interatomic Potential, Firsov

2-29

Interatomic Potential, Lindhard

2-30

Interatomic Potentials

2-10 to 2-33

Interatomic Potentials, Universal

2-27 to 2-33, 2-44 to 2-47

Interstitial Atoms in TRIM

8-7, 8-9 to 8-10

Interstitial Production in TRIM

7-27 to 7-28,8-7, 8-9 to 8-10

Ion Energy Reducers (Degraders)

8-20 to 8-22

Ion Mixing Calculations

8-22

Ion Mixing, Tutorial #2

11-8 to 11-14

Ion Range, 3-D Plot

9-13

Ion Ranges, Tutorial #1

11-2 to 11-7

Ion Screening Length

3-29

Ion Straggling

Ch 6

Ion Trajectory – Random Walk

10-2

Ion’s 3-D Path in Target

8-23 to 8-24

Ion’s Range – Algorithm

10-4 to 10-12

Ionization in Target, Tutorial #4

11-21 to 11-28

Ionization Plot in TRIM

9-25 to 9-26

Isotopically Enriched Targets

8-20

K

 

Kinchin-Pease Damage in TRIM

7-27 to 7-28,8-7, 8-9 to 8-10

Koln, Core and Bond Model

5-2 to 5-3

Kurtosis

6-1, 6-10 to 6-20, 8-24 to 8-25

L

 

Laboratory Coordinates

2-3

Lamb, Willis

1-8, 1-11

Landau Straggling

6-6 to 6-7

Lateral Range Distribution Plot

9-15 to 9-17

LATERAL.txt Datafile

9-15 to 9-17

Lattice Binding Energy in TRIM

8-7, 8-9 to 8-10

Lattice Binding Energy, Tutorial #4

11-21 to 11-28

Layered Structures in TRIM

7-33

LDA and Shell Corrections

4-10 to 4-20

Legal Notice about SRIM

8-33 to 8-34

Lenz-Jenzen Atom

2-20

Light Ion Stopping

Ch 4

Lindhard Interatomic Potential

2-30

Lindhard Stopping

4-37 to 4-44

Lindhard, J

1-12, 3-4 to 3-6

Liquid, Stopping in

5-6 to 5-7, 5-21

Local Density Approximation (LDA)

3-6 to 3-10, 4-37 to 4-44

LSS Theory

1-15

M

 

Magic Formula

7-3 to 7-7

Magic Formula for Binary Scattering

2-38 to 2-43

Marsden, E

1-5

Masking Effects in TRIM

7-34, 9-13

Mixing of Layers, Tutorial #2

11-8 to 11-14

Moliere Atom

2-20, 3-8

Monolayer Collisions Steps in TRIM

8-4

N

 

Neutron Induced Cascades in TRIM

8-4, 8-16 to 8-18

New Principles of Gunnery (1848)

1-1

Northcliffe, L.

4-3

Nuclear Fission

1-5

Nuclear Stopping

Ch 2

Nuclear Stopping, Straggling of

10-18 to 10-19

Nuclear Stopping, Universal

2-34 to 2-36, 10-15 to 10-18

Nuclear Straggling

2-36 to 2-38, 6-1, 6-10 to 6-20

P

 

Parameters of the Magic Formula

7-5 to 7-7

Peaks and Dips in TRIM

8-26 to 8-27

Periodic Table in TRIM

8-5

Phase Corrections

5-6 to 5-7, 5-21

Phonon Plot in TRIM

9-26 to 9-27

Phonons in Target, Tutorial #4

11-21 to 11-28

Phonons in TRIM

8-7, 8-9 to 8-10

Photon Induced Cascades in TRIM

8-4, 8-16 to 8-18

Physics of Recoil Cascades

8-9

Plot, 3-D Ion Ranges

9-13

Plot, Ion Ranges under a Mask

9-13

Plot, Lateral Range Distribution

9-15 to 9-17

Plots, Changing Colors

8-30, 9-41

Plots, TRIM Ion Ranges

9-9 to 9-12

Plots, TRIM Recoil Distributions

9-10 to 9-12

Polyimide, Stopping in

5-10

Polystyrene, Stopping in

5-9

Polysulphone, Stopping in

5-10

Potentials, Universal Interatomic

2-44 to 2-47

Powers, D.

5-1 to 5-3

PRAL Software

Ch 10

PRAL Tables, Accuracy

10-8 to 10-11

Projected Range – Algorithm

10-4 to 10-12

Projected Ranges

7-19 to 7-20, 8-24 to 8-25

R

 

Radial Ranges

7-19 to 7-20, 8-24 to 8-25

Random Number Seed in TRIM

7-35

Randomness in Ion Trajectory

10-2

Range of Ions – Algorithm

10-4 to 10-12

Range Straggling

Ch 6

RANGE.txt, TRIM Datafile

9-10 to 9-12

RANGE-3D.txt, TRIM Datafile

9-14 to 9-15

Ranges, He in Air

5-23

Ranges, History of

Ch 1

Recoil Cascades, Tutorial #4

11-21 to 11-28

Recoil Energy Plot in TRIM

9-31 to 9-32

Regional Settings in TRIM

8-5

Relativistic Stopping

3-3, Ch 4

Replacement Collisions in TRIM

7-27 to 7-28,8-7, 8-9 to 8-10

Replacement Collisions, Tutorial #4

11-21 to 11-28

Replacements, Plot in TRIM

9-27 to 9-31

Ritchie, R.

1-12

Robins, Benjamin

1-1

Rutherford, Ernst

1-5

S

 

Sabin, J.

5-2 to 5-3

Scaling of Heavy Ion Stopping

3-24 to 3-40

Scientific Background of TRIM

Ch 7

Screening Function, Definition

2-18

Screening Length of Ions

3-29

Screening Length, Thomas-Fermi

2-18

Setup of TRIM Calculation

Ch 8

Setup Window in TRIM

8-2 to 8-3

Shell Correction to Stopping

4-6 to 4-20

Shell Corrections, Bichsel

4-10 to 4-20

Shell Corrections, LDA

4-10 to 4-20

Sigmund, Peter

1-17, 1-18, 3-1, 4-3, 5-2, 6-18

Skewness

6-1, 6-10 to 6-20, 8-24 to 8-25

Solid / Gas Targets in TRIM

8-22 to 8-23

Solid / Gas Targets, Tutorial #3

11-15 to 11-20

Solid State Charge Distributions

2-10 to 2-33

Sommerfeld, E.

2-10

SPUTTER.txt Datafile

9-21 to 9-23

Sputtered Atom Datafile

9-21 to 9-23

Sputtering

7-28 to 7-32, 8-4, 8-8, 8-10 to 8-11

Sputtering, Tutorial #2

11-8 to 11-14

SRIM as a Subroutine

8-32 to 8-35

SRIM Definitions

1-1

SRIM History

1-1 to 1-23

SRIM Legal Notice

8-33 to 8-34

SRIM Module

8-32 to 8-35

SRIM Tutorials

Ch 11

SRIM, Bonding Corrections

5-3 to 5-23

Stopping and Range Tables

Ch 10

Stopping and Range Tables, Accuracy

10-8 to 10-11

Stopping Force

1-18

Stopping in Ethylene

5-8

Stopping in Formvar

5-10

Stopping in Gas Phase

5-6 to 5-7, 5-21

Stopping in Hydrocarbons

5-2 to 5-3, 5-10

Stopping in Polyimide

5-10

Stopping in Polystyrene

5-9, 5-19

Stopping in Polysulphone

5-10

Stopping in Water

5-6 to 5-7

Stopping Number, Definition

4-7

Stopping of Helium Ions

3-10 to 3-16

Stopping of Hydrogen Ions

3-10 to 3-20

Stopping, 3-D Plots

8-19, 8-23 to 8-24, 9-14 to 9-15

Stopping, Barkas-Andersen Correction

4-7, 4-22 to 4-32

Stopping, Bloch Correction

4-7, 4-30 to 4-33

Stopping, Bonding Corrections

5-12 to 5-17

Stopping, Brandt-Kitagawa Theory

3-29 to 3-40

Stopping, Density Effect

4-6, 4-20 to 4-21

Stopping, Effective Charge

4-8

Stopping, Effects of Roughness

6-18

Stopping, Effects of Texture

6-18

Stopping, Electronic

Ch 2, 3 and 4

Stopping, Energetic Light Ions

Ch 4

Stopping, History

Ch 1, 4-2

Stopping, LDA Calculation

4-37 to 4-44

Stopping, Lindhard

3-4 to 3-6, 4-37 to 4-44

Stopping, Nuclear (Universal)

Ch 2, 10-15 to 10-18

Stopping, Shell Correction

4-6 to 4-20

Stopping, Straggling in

Ch 6

Stopping, Straggling in Nuclear

10-18 to 10-19

Stopping,, Compounds and Gases

Ch 5

Straggling

Ch 6

Straggling in Nuclear Stopping

10-18 to 10-19

Straggling in TRIM Ranges

7-18 to 7-23

Straggling using Energy Degraders

8-20 to 8-22

Straggling, Bohr

6-5 to 6-6

Straggling, Electronic in TRIM

7-24 to 7-26

Straggling, Landau Theory

6-6 to 6-7

Straggling, Nuclear

2-36 to 2-38, 6-1, 6-10 to 6-20

Straggling, Vavilov

6-7 to 6-10

Subroutine, Making SRIM into a

8-32 to 8-35

Surface Binding Energy in TRIM

8-7, 8-9 to 8-10

Surface Binding Energy, Tutorial #4

11-21 to 11-28

T

 

Tables of Ion Ranges – Algorthm

10-4 to 10-12

Tables of Ranges, Accuracy

10-8 to 10-11

Tables, Stopping and Range

Ch 10

Target Damage in TRIM

7-26 to 7-28,8-7, 8-9 to 8-10

Target Damage, Tutorial #4

11-21 to 11-28

Target Phase in TRIM

8-6, 8-11

Target Roughness and Stopping

6-18

Target Sputtering in TRIM

7-28 to 7-32, 8-10 to 8-11

TDATA.sav, TRIM Datafile

9-7 to 9-8

Teller, E.

1-8, 1-11, 3-3

Texture Effects on Stopping

6-18

Thomas Fermi Atom

1-13 to 1-15, 2-10, 2-20, 3-25

Thomas-Fermi Screening Length

2-18, 2-23

Thompson, J. J.

1-2 to 1-5

Three Dimension Ion Ranges

9-13

Three Dimensional Stopping Data

8-23 to 8-24

Three Dimensional Stopping Datafile

9-17 to 9-18

Three-Dimension Plots of Stopping

8-19

TRANSMIT.txt Datafile

9-19 to 9-20

Transmitted Ions Datafile

9-19 to 9-20

Transmitted Ions in TRIM

8-8

TRIM – Target Damage

7-26 to 7-28, 8-7, 8-9 to 8-10

TRIM Backscattered Ions

9-18 to 9-20

TRIM Data in Two Dimensions

7-21 to 7-22, 7-34

TRIM Datafile: COLLISON.txt (Full Cascades)

9-38 to 9-39

TRIM Datafile: COLLISON.txt (No Cascades)

9-36 to 9-37

TRIM Datafile: COLLISON.txt (Quick Damage)

9-32 to 9-36

TRIM Datafile: IONIZ.txt

9-25 to 9-26

TRIM Datafile: LATERAL.txt

9-15 to 9-17

TRIM Datafile: NOVAC.txt (Replacement Collisions)

9-27 to 9-31

TRIM Datafile: PHONON.txt

9-26 to 9-27

TRIM Datafile: RANGE.txt

9-11 to 9-12

TRIM Datafile: RANGE-3D.txt

9-14 to 9-15

TRIM Datafile: TDATA.sav

9-7 to 9-8

TRIM Datafile: TRIM.IN

8-27 to 8-30

TRIM Datafile: TRIMOUT.txt

9-24

TRIM Datafile: VACANCY.txt

9-27 to 9-30

TRIM Error, Recoil Cascade Size

8-31 to 8-32

TRIM Error, Regional Settings

8-5

TRIM FAQs

9-41

TRIM Free Flight Path (FFP)

7-7 to 7-17

TRIM Output Datafiles

Ch 9

TRIM Plot: Ion Ranges

9-9 to 9-12

TRIM Plot: Recoil Distribution

9-10 to 9-12

TRIM Range Straggling

7-18 to 7-23

TRIM Setup Window

8-2 to 8-3

TRIM Sputtered Atoms

9-21 to 9-23

TRIM, 3-D Datafile of Ion’s Path

8-23 to 8-24

TRIM, 3-D Datafile of Stopping

8-23 to 8-24

TRIM, 3-D Plots of Stopping

8-19

TRIM, Anomalous Peaks and Dips

8-26 to 8-27

TRIM, Auto-Saving Calculation

8-8

TRIM, Backscattered Ions

8-8

TRIM, Biological Targets

8-4

TRIM, Changing Plot Colors

8-30, 9-41

TRIM, Compound Dictionary

8-6, 8-11

TRIM, Displacement Energy

8-7, 8-9 to 8-10

TRIM, Electron Induced Cascades

8-4

TRIM, Electronic Straggling

7-24 to 7-26

TRIM, Energy to Recoils Plot

9-31 to 9-32

TRIM, Error #62

8-15

TRIM, Error in TRIM.DAT file

8-15

TRIM, Help

9-41

TRIM, High Resolution Collision Data

8-22

TRIM, Input / Setup

Ch 8

TRIM, Interstitial Atoms

8-7, 8-9 to 8-10

TRIM, Ion Angle of Incidence

8-5

TRIM, Ion Mixing Calculations

8-22

TRIM, Ionization Plot

9-25 to 9-26

TRIM, Isotopically Enriched Targets

8-20

TRIM, Kinchin Pease Damage

7-27 to 7-28,8-7, 8-9 to 8-10

TRIM, Lattice Binding Energy

8-7, 8-9 to 8-10

TRIM, Layered Structures

7-33 to 7-34

TRIM, Making Animated Plots

9-41

TRIM, Maximum Recoil Cascade Size Error

8-31 to 8-32

TRIM, Mixed Solid/Gas Targets

8-22 to 8-23

TRIM, Modifying During Calculation

9-39

TRIM, Neutron Induced Cascades

8-4

TRIM, Periodic Table

8-5

TRIM, Phonon Plot

9-26 to 9-27

TRIM, Phonons

8-7, 8-9 to 8-10

TRIM, Projected Range

7-19 to 7-20

TRIM, Radial Range

7-19 to 7-20

TRIM, Random Numbers

7-35

TRIM, Ranges under a Mask

7-34

TRIM, Replacements Plot

9-27 to 9-31

TRIM, Running in Batch Mode

8-27 to 8-30

TRIM, Scientific Background

Ch 7

TRIM, Scientific Explanations

9-41

TRIM, Solid or Gas Target

8-6, 8-11

TRIM, Sputtered Atoms

8-8

TRIM, Sputtering in

7-28 to 7-32, 8-10 to 8-11

TRIM, Surface Binding Energy

8-7, 8-9 to 8-10

TRIM, the Magic Formula

7-3 to 7-7

TRIM, Transmitted Ions

8-8

TRIM, Types of Calculations

8-3 to 8-4

TRIM, Vacancy Plot

9-27 to 9-30

TRIM, Various Ion Angles

8-4, 8-13 to 8-18

TRIM, Various Ion Energies

8-4, 8-13 to 8-18

TRIM, Various Ion Starting Positions

8-4, 8-13 to 8-18

TRIM, Viewing Window

8-7

TRIM. Datafile TRIM.IN

9-5 to 9-7

TRIM.DAT setup file

8-4, 8-13 to 8-18

TRIM.IN datafile

8-27 to 8-30, 9-5 to 9-7

TRIMOUT.txt

9-24

Tutorial #1, Ion Ranges, Doses

11-2 to 11-7

Tutorial #2, Layer Mixing, Sputtering

11-8 to 11-14

Tutorial #3, Complex Targets

11-15 to 11-20

Tutorial #4, Target Damage

11-21 to 11-28

Tutorials on SRIM

Ch 11

Two Atom Scattering, Magic Formula

2-10 to 2-33, 2-38 to 2-43

Two Dimensional TRIM Plots

7-21 to 7-22, 7-34

Two-Atom Scattering

Ch 2

Two-Body Collisions and Scattering Angles

7-7 to 7-8

U

 

Universal Interatomic Potential

2-27 to 2-33, 2-44 to 2-47

Universal Nuclear Stopping

2-34 to 2-36, 10-15 to 10-18

V

 

Vacancies in Target, Tutorial #4

11-21 to 11-28

Vacancy Plot in TRIM

9-27 to 9-30

Vacancy Production in TRIM

7-27 to 7-28,8-7, 8-9 to 8-10

Vacancy Production using Kinchin-Pease Model

7-27 to 7-28,8-7, 8-9 to 8-10

Vavilov Straggling

6-7 to 6-10

Viewing Window in TRIM

8-7

W

 

Water, Stopping in

5-6 to 5-7

Weird Distributions in TRIM

8-26 to 8-27

Whaling, W.

1-17

Windows, Regional Settings

8-5

Z

 

ZBL Potential

2-27 to 2-33